Batch firing furnaceApply

Quartz products such as CVD, epitaxial deposition and other high temperature treatment processes are available.

Products include: process tube, inner tube, boat, insulation barrel, nozzle, bell jar and other complex parts

Monolithic application

Quartz products are available for common monolithic applications.

Products include: quartz rings, quartz Windows, gas shunt plates, quartz nozzles, half hoods, CVD quartz liners, RTP/RTO, EPI and quartz etched components.