Batch firing furnaceApplication

Quartz products are provided through processes such as CVD, epitaxial deposition and other high-temperature treatment techniques.

The products include: process tubes, inner tubes, boats, insulated buckets, nozzles, bell jars and various other complex components

Single-chip application

Common monolithic applications provide quartz products.

The products include: quartz rings, quartz Windows, gas distribution plates, quartz nozzles, half covers, CVD quartz liners, RTP/RTO, EPI and quartz etched components, etc.